|
|
| Semiconductor Equipment Department |
|
| Back to Products Lineup |
| |
|
 |
6", 8" & 12" Wafer Prober
Model: OPUSII |
 |
| Features: |
| (1) |
6", 8" & 12" Wafers without Mechanical Changeover |
| (2) |
Flat Top for Large Test Head
(compatible with SEMI Standards) |
| (3) |
Fast Linear Motor Control for XY Stage |
| (4) |
Z-Down Control at the Time of Power-Down |
| (5) |
200x100 Needle Cleaner |
| (6) |
CCD Camera Cassette Mapping for Thin Wafers |
| (7) |
One-Touch Card Changer |
| (8) |
High-Performance OCR |
| (9) |
SECS GEM Compliance |
| (10) |
Short Index Time |
|
 |
|
|
| Basic Specifications |
| Model |
OPUSII |
| Wafer Size/ Thickness |
6", 8" & 12" Wafers/ 180µm - 2000µm |
| Accuracy |
Positioning Accuracy: }1.5µm (X/Y), }3µm (Z)
Contact Accuracy: }3µm (X/Y), }5µm (Z) |
| Card Holder Unit Flatness |
Max. 20µm, Ø300mm |
| Temperature Range |
Ambient - +150ºC (Option: -40ºC/ -10ºC)
|
| Chuck Force |
200kg |
| Index Time |
200 msec. (5mm x 5mm x 0.5mm) |
| Dimensions |
1460mm (W) x 1350mm (D) x 960mm (H) |
| Weight |
1500kg |
|
Available Versions
 |
 |
| OPUSII-S |
OPUSII-M |
|
Back to Products Lineup
|
|
| |
Distributed by
Silicon Valley Branch
1615 Wyatt Drive, Santa Clara, CA 95054 United States
Tel: (408) 501-1470/ (408) 501-1471
E-Mail: salesurs7@kanematsuusa.com
Company Website: www.kanematsuusa.com |
| |
| ©2009 Kanematsu USA Inc. - all rights reserved |
| SEMICS Wafer Prober OPUSII OPUS2 |
|
|
