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| Semiconductor Equipment Department |
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6", 8" & 12" Wafer Prober
Model: OPUS3 |
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| Features: |
| (1) |
Smart Probe card Alignment (SPA) Mechanism |
| (2) |
Intelligent Overdrive Control |
| (3) |
6", 8" & 12" Wafers without Mechanical Changeover |
| (4) |
Superior Tri-Temp. Control (Cold/ Ambient/ Hot) |
| (5) |
Flat Top for Large Test Head |
| (6) |
Easy On-Site Calibration |
| (7) |
Fast Index/ Less Vibration |
| (8) |
Fastest & Simplest Auto Card Changer |
| (9) |
Fast Linear Motor Control for XY Stage |
| (10) |
Z-Down Control at the Time of Power-Down |
| (11) |
200x100 Needle Cleaner |
| (12) |
CCD Camera Cassette Mapping for Thin Wafers |
| (13) |
High-Performance OCR |
| (14) |
SECS GEM Compliance |
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| SPA (Smart Probe card Alignment) |
Monitoring the contact pressure of probe pins, wafer chuck
automatically automatically align itself to probe card. |
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| Basic Specifications |
| Model |
OPUS3 |
| Wafer Size |
6", 8" & 12" Wafers |
| Accuracy |
±1.5µm |
| Card Changer |
350mm - 480mm |
| Temperature Range |
-55 - +200ºC (with Ambient Control)
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| Chuck Force |
300kg |
| Index Time |
200 msec. (5mm x 5mm x 0.5mm) |
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Auto Cassette Loader may be ordered in 3 different ways:
(1) Flat Top Loader
(2) Top Loader
(3) Dual Foup Loader |
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| OPUS3 with Top Loader |
OPUS3 Dual Foup Loader |
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Distributed by
Silicon Valley Branch
1615 Wyatt Drive, Santa Clara, CA 95054 United States
Tel: (408) 501-1470/ (408) 501-1471
E-Mail: salesurs7@kanematsuusa.com
Company Website: www.kanematsuusa.com |
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| ©2009 Kanematsu USA Inc. - all rights reserved |
| SEMICS wafer prober OPUS3 OPUSIII |
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